Features

• TDI mode provides very high sensitivity
• High-speed continuous image acquisition
• Back-thinned structure ensures high sensitivity from UV to near IR
• Multiple ports for high-speed line rate

Applications

• Sequential imaging of high-speed moving samples
• Inspection tasks on electronic parts production line
• Semiconductor inspection
• Flow cytometery

What is TDI Mode?

In FFT-CCD, the TDI mode performs continuous imaging of a fast moving object by transfering the signals at the same rate as the speed of the moving object. TDI mode allows for acquiring continuous, clear images with high S/N and no frame breaks. Since signals of all pixels in each row are accumulated, sensitivity variations can be drastically improved when compared to two-dimensional operation.

Quantum efficiency vs. wavelength

The back-thinned (back-illuminated) structure ensures higher sensitivity than front-illuminated types in the UV through the near IR region (200 to 1100 nm).

TDI-CCD sensor structure

[Example: S10201-04, 2048 (H) x 128 (V) pixels, 4 ports on each side x 2 (bidirectional transfer) ]

Multiple amplifiers (multiple output ports) permits parallel image readout at a fast line rate.