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Microfocus X-ray Source (MFX)

Hamamatsu has developed a range of sealed microfocus X-ray sources for non-destructive inspection. The smallest spot size that can be obtained with the 150 kV L8121-03 is 5 micron and the L8321-01 offers a spot size of <1 micron.  These provide sharp images even at maximum magnification. There are many sources which are hermetically sealed and air cooled and feature RS-232C interface for external control. Most of the units contain both the high voltage power supply and air cooled, sealed X-ray tube in one package, for simple operation. Microfocus sources with open tubes that permit changing of the cathode are also available. Applications include IC and PC inspection and critical parts inspection such as turbine blades for small cracks. 

 

Part Number
 
Tube
Voltage
kV  
Tube
Current
µA  
Min. X-ray
Focal Spot Size
µm  
X-ray
Beam Angle
degrees  
FOD
(Focus to object
distance)
mm  
L10321      20-100 10-200 5 118 7.3
L10101      20-100 10-200 5 39 6.8
L9631      40-110 10-800 15 62 16.8
L9421-02      20-90 10-200 5 39 9.5
L9181-02      40-130 10-300 5 45 13
L9181    40-130 0-300 5 100 13
L8321-01      162 200 1 120 0.5
L8321      162 200 1 120 0.5
L8121-03      40-150 10-500 5 43 17
L8031-01      20-100 0-250 5 39 9.5
L7901-01      20-100 0-250 5 39 9.5
L6731-01      20-80 100 8 39 12
Part Number
Tube
Voltage
Tube
Current
Min. X-ray
Focal Spot Size
X-ray
Beam Angle
FOD
(Focus to object
distance)
 
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