| Part number |
C8000-10 |
| Name of product |
BT-CCD Video Camera |
| Spectral response min |
125nm |
| Spectral response max |
1125nm |
|
Features |
- High UV sensitivity
- 640x480, 14µm square pixels, 2/3 format
- 30 fps at full resolution
- Passive air peltier cooling
- 12-bit digital output, RS-422 Digital Output/RS-232 Control
- On-chip integration to 1 second, binning and sub-array
- Digitally controlled analog contrast enhancement
- Custom systems capable of soft X-ray and 13.5nm EUV imaging
|
|
Applications |
- Lithography
- UV metrology
- Wafer inspection
- Combustion Analysis
- Spectroscopy
- Direct X-ray imaging
- EUV applications
|
| Imaging device |
back-thinned frame transfer CCD |
| Horizontal number of pixels |
640 |
| Vertical number of pixels |
480 |
| Cell size - horizontal |
14µm |
| Cell size - vertical |
14µm |
| Effective Horizontal Size |
8.96mm |
| Effective Vertical Size |
6.72mm |
| Scan Mode 1 |
Slow Scan |
| Scan Mode 2 |
High ScanMHz |
| Frame Rate Scan Mode 1 |
40r.m.s. |
| Frame Rate Scan Mode 2 |
131.6r.m.s. |
| Full well capacity Scan Mode 1 |
5.0E+04 |
| Full well capacity Scan Mode 2 |
5.0E+04 |
| Dynamic Range Scan Mode 1 |
500:01:00bits |
| Dynamic Range Scan Mode 2 |
500:01:00bits |
| A/D converter Scan Mode 1 |
12 |
| A/D converter Scan Mode 2 |
12 |
| Dark current |
135e-/pix/sec |
| Cooling Method |
Peltier, natural air |
| Cooling Temperature |
5 |
| Output type |
RS-644 LVDS |
| Exposure time max |
1secs |
| External control |
RS-232C |
| Sub-array |
yes |
| Binning |
yes |
| External trigger |
yes |
| Contrast Enhancement |
approx 1-5 times"Vac ; Hz" |
| Lens mount |
C-mount |
| Line voltage |
100/117/220/240 Vac50/60 Hz |