| Part number |
C8000-20 |
| Name of product |
BT-CCD Video Camera |
| Spectral response min |
125nm |
| Spectral response max |
1125nm |
|
Features |
- Front panel contrast enhancement circuits dramatically improve low-contrast images
- Sensitivity from 110nm to 1100nm (170nm to 1100nm typ.)
- Resolution of 658(H) x 490(V), 14um square pixels
- Real time image processing including background subtraction and frame averaging
- SCSI digital control
- C-mount and 2/3" chip format
- Video rate imaging with digital interface option
- Custom systems capable of 13.5nm EUV imaging
|
|
Applications |
- Semiconductor emissions detection
- Lithography
- UV metrology
- Wafer inspection
- Combustion Analysis
- Spectroscopy
- EUV applications
|
| Imaging device |
back-thinned frame transfer CCD |
| Horizontal number of pixels |
640 |
| Vertical number of pixels |
480 |
| Cell size - horizontal |
14µm |
| Cell size - vertical |
14µm |
| Effective Horizontal Size |
8.96mm |
| Effective Vertical Size |
6.72mm |
| Frame Rate Scan Mode 1 |
30r.m.s. |
| Read noise Scan Mode 1 |
150electrons |
| Full well capacity Scan Mode 1 |
6.5E+04 |
| Dynamic Range Scan Mode 1 |
430:01:00bits |
| A/D converter Scan Mode 1 |
10 |
| Cooling Method |
non-cooling |
| Output type |
RS-644, RS-170A |
| External control |
RS-232C |
| Contrast Enhancement |
yes"Vac ; Hz" |
| Lens mount |
C-mount |