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Part numberTypeName of product
C8800-21CCameras1k x 1k, 30Hz, Digital CCD Camera, cooled


Click image to enlarge

Hamamatsu’s unique back thinned CCD chip offers 90% QE at wavelengths in the VUV (157nm) and VIS (550nm-750nm) region without the need for AR coatings and typically not less than 40% at other UV and VIS wavelength. The C8000-20 camera’s high sensitivity at a wide range of wavelengths and 30 fps RS-170 video output make it an ideal choice for real time imaging from the VUV and DUV to the VIS and NIR.

DUV versus VUV Imaging Options

The standard C8000-20 camera with C-mount interface offers sensitivity to wavelengths as short as 110nm, however wavelengths below 170nm require imaging in an N2 purged environment due to oxygen absorption at those wavelengths. True vacuum imaging requires modifications to the C8000-20's chip package and a custom vacuum compatible flange.
 
 Datasheet:  84 KB 
 
 
Key Specifications Drawing

Part number C8800-21C
Name of product 1k x 1k, 30Hz, Digital CCD Camera, cooled
Spectral response min 400nm
Spectral response max 1050nm
Features
  • Front panel contrast enhancement circuits dramatically improve low-contrast images
  • Sensitivity from 110nm to 1100nm (170nm to 1100nm typ.)
  • Resolution of 658(H) x 490(V), 14um square pixels
  • Real time image processing including background subtraction and frame averaging
  • SCSI digital control
  • C-mount and 2/3 chip format
  • Video rate imaging with digital interface option
  • Custom systems capable of 13.5nm EUV imaging
Applications
  • Semiconductor emissions detection
  • Lithography
  • UV metrology
  • Wafer inspection
  • Combustion Analysis
  • Spectroscopy
  • EUV applications
  • Imaging device frame transer CCD
    Shutter electronic
    Horizontal number of pixels 1000
    Vertical number of pixels 1000
    Cell size - horizontal 8µm
    Cell size - vertical 8µm
    Effective Horizontal Size 8mm
    Effective Vertical Size 8mm
    Pixel clock rate Scan Mode 1 40Fr/sec
    Frame Rate Scan Mode 1 159 with binningr.m.s.
    Read noise Scan Mode 1 25electrons
    Full well capacity Scan Mode 1 2.3E+04
    Dynamic Range Scan Mode 1 920:01:00bits
    A/D converter Scan Mode 1 12
    Dark current 25e-/pix/sec
    Cooling Method forced air Peltier cooling with hermetic sealing
    Cooling Temperature -20
    Output type Camera Link
    Exposure time min 500ms
    Exposure time max 10secs
    External control Camera Link
    Sub-array yes
    Binning yes
    External trigger yes
    Contrast Enhancement 1-5 times"Vac ; Hz"
    Lens mount C-mount
    Line voltage DC +12V


    Click image to enlarge
    Typical Spectral Response

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