| Part number |
C8800-21C |
| Name of product |
1k x 1k, 30Hz, Digital CCD Camera, cooled |
| Spectral response min |
400nm |
| Spectral response max |
1050nm |
|
Features |
- Front panel contrast enhancement circuits dramatically improve low-contrast images
- Sensitivity from 110nm to 1100nm (170nm to 1100nm typ.)
- Resolution of 658(H) x 490(V), 14um square pixels
- Real time image processing including background subtraction and frame averaging
- SCSI digital control
- C-mount and 2/3 chip format
- Video rate imaging with digital interface option
- Custom systems capable of 13.5nm EUV imaging
|
|
Applications |
|
Semiconductor emissions detectionLithography UV metrology Wafer inspection Combustion Analysis Spectroscopy EUV applications |
| Imaging device |
frame transer CCD |
| Shutter |
electronic |
| Horizontal number of pixels |
1000 |
| Vertical number of pixels |
1000 |
| Cell size - horizontal |
8µm |
| Cell size - vertical |
8µm |
| Effective Horizontal Size |
8mm |
| Effective Vertical Size |
8mm |
| Pixel clock rate Scan Mode 1 |
40Fr/sec |
| Frame Rate Scan Mode 1 |
159 with binningr.m.s. |
| Read noise Scan Mode 1 |
25electrons |
| Full well capacity Scan Mode 1 |
2.3E+04 |
| Dynamic Range Scan Mode 1 |
920:01:00bits |
| A/D converter Scan Mode 1 |
12 |
| Dark current |
25e-/pix/sec |
| Cooling Method |
forced air Peltier cooling with hermetic sealing |
| Cooling Temperature |
-20 |
| Output type |
Camera Link |
| Exposure time min |
500ms |
| Exposure time max |
10secs |
| External control |
Camera Link |
| Sub-array |
yes |
| Binning |
yes |
| External trigger |
yes |
| Contrast Enhancement |
1-5 times"Vac ; Hz" |
| Lens mount |
C-mount |
| Line voltage |
DC +12V |