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Part numberType
C8000-10High Sensitivity


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Hamamatsu's unique back thinned frame transfer CCD chip offers 90% QE at wavelengths in the VUV (157nm) and VIS (550nm-750nm) region without the need for AR coatings and typically not less than 40% at other UV and VIS wavelengths. Custom chip modifications allow for soft X-ray and EUV (13.5nm) imaging. The C8000-10 camera's high sensitivity at a wide range of wavelengths, high frame rate, cooling and multiple read out clocks makes it an ideal choice for high signal to noise X-ray, EUV, VUV-NIR imaging.
 
 Datasheet:  67 KB 
 
 
Key Specifications Typical Spectral Response

Part number C8000-10
Name of product BT-CCD Video Camera
Min
125 nm
Max
1125 nm
Features
  • High UV sensitivity
  • 640x480, 14µm square pixels, 2/3"" format
  • 30 fps at full resolution
  • Passive air peltier cooling
  • 12-bit digital output, RS-422 Digital Output/RS-232 Control
  • On-chip integration to 1 second, binning and sub-array
  • Digitally controlled analog contrast enhancement
  • Custom systems capable of soft X-ray and 13.5nm EUV imaging
Applications
  • Lithography
  • UV metrology
  • Wafer inspection
  • Combustion Analysis
  • Spectroscopy
  • Direct X-ray imaging
  • EUV applications
Imaging device back-thinned frame transfer CCD
Horiz. pixels 640
Vert. pixels 480
Cell size - horizontal 14 µm
Cell size - vertical 14 µm
Effective Horizontal Size 8.96 mm
Effective Vertical Size 6.72 mm
Scan Mode Slow Scan
Scan Mode 2 High Scan
Frame Rate 40 fps
Frame Rate Scan Mode 2 131.6 fps
Full well capacity 5.0E+04 electrons
Full well capacity Scan Mode 2 5.0E+04 electrons
Dynamic Range 500:01:00
Dynamic Range Scan Mode 2 500:01:00
A/D converter 12 bits
A/D converter Scan Mode 2 12 bits
Dark current 135 e-/pix/sec
Cooling Method Peltier, natural air
Cooling Temperature 5 c
Output type RS-644 LVDS
Exposure time max 1 secs
External control RS-232C
Sub-array yes
Binning yes
External trigger yes
Contrast Enhancement approx 1-5 times
Lens mount C-mount
Line voltage 100/117/220/240 V
50/60 Hz
Power consumption 70 VA


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