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Part number	Type
C8484-16C	IR / UV / X-ray

Click image to enlarge	This 1/2 inch progressive scan interline CCD has 40% QE at 200 nm and shows extremly good resolution with 1344 x 1024 pixels. It is consequently suitable for Eximer KrF and ArF laser beam diagnostics, semi-conductor mask alignement, etc...
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Key Specifications	Drawing
Part number C8484-16C Name of product High Performance UV Digital Camera Features High sensitivity in UV region Extremely high resolution with 1344x1024 pixels/small pixel size(4,65µm) Progressive scan interline readout with no mechanical shutter Low readout noise design (14 electrons typ.) Anti-Blooming function with vertical overflow drain structure 12 bit digitizer Analog contrast enhancement Applications Excimer KrF(248nm), ArF(193nm) laser beam diagnostics UV imaging with Excimer KrF,Arf laser Semiconductor mask alignment UV optics development General UV imaging UV metrology Lithograply Imaging device Progressive scan interline CCD chip with micro-lenses Horiz. pixels 1344 Vert. pixels 1024 Frame Rate 11.9 fps Read noise 14 r.m.s. Dynamic Range 778:1 A/D converter 12 bits Exposure time min 0.012 ms Exposure time max 1 secs External control RS-232C Sub-array 1344 (H) x 8 to 1024 (V) External trigger Yes Lens mount C-mount Power consumption approx 8 VA Pixels 1344 (H) x 1024 (V)	Click image to enlarge Typical Spectral Response Click image to enlarge