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Failure Analysis

Hamamatsu provides photoemission (EMMI) and thermal emission microscopes, as well as thermal (OBIRCH) and photoelectrical (OBIC) laser stimulation systems for the failure analysis field and the design debug markets.

Our tools are suited for a wide variety of architecture: from the die or wafer level, to package or applications board level, up to probe card level and direct docking with tester environment. Using our tools, our customers observe parametric defects in static conditions and/or functional failures in dynamic conditions.

For over 20 years, our failure analysis tools are known worldwide as high-quality products. We combine our state-of-the-art confocal optical design for various wavelength bandwidths with our own core detection technologies such as InGaAs or thermal sensors. In addition, we integrate highly accurate and stable mechanical stages down to the microprobing level.

 

Part Number
 
Name of product
 
Brief description
 
C9107   IC Backside Polishing System An advanced IC backside polishing system for use when preparing a sample for backside failure analysis with the Phemos Series
C7103   IC Backside Polishing System An IC backside polishing system for use when preparing a sample for backside emission analysis with the Phemos Series+C4
µAmos   Laser Stimulation Microscope System Laser stimulation system for short, void and current leakage localization
µAMOS 200   IR-OBIRCH analysis system Semiconductor failure analysis system using IR-OBIRCH
iPhemos-SD   iPhemos-SD Inverted Optical Failure Analysis Tool
TriPhemos   Time Resolved Emission Microscopy Imaging System Inverted Optical Failure Analysis Tool
Themos mini   Thermal Emission Microscope System The THEMOS mini true thermal emission microscope provides high thermal localization resolution. The optional Lock-in Thermography provides superior sensitivity.
THEMOS 1000   Thermal Emission Microscope System - THEMOS 1000

The THEMOS-1000 series true thermal emission microscope with integrated IR confocal LSM provides high thermal localization resolution.

Phemos 2000   IR Confocal Emission Microscope System with Laser Stimulation Option; 300mm, <90nm IR confocal emission microscope with laser stimulation option
Phemos 1000   IR Confocal Emission Microscope System with Laser Stimulation Option; 2-300mm, >90nm IR confocal emission microscope with laser stimulation option
IPHEMOS SERIES   iPhemos Series Inverted Optical Failure Analysis Tool
FA NAV (U10024-01)            Failure Analysis Navigation Software An advanced navigation software with intelligent functions for failure site localization
Part Number
Name of product
Brief description
 
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