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The FA-Navigation software allows to display CAD data and data from failure localization tools like the emission microscope PHEMOS-1000 or the thermal emission system THEMOS-1000. CAD data, pattern images and defect images from those localization tools can be overlaied precisely. Furthermore failure signal regions can be selected (if multi site failure signals have been observed) and automatically correlated with the data from the NET-list. The NETs will be automatically sorted in the order of the number of regions they pass through, easily narrowing down the possible nets likely responsible for the detected signals. The related nets will be highlighted in the CAD image. This allows to exactly localize the failure sites, even below the spatial resolution of the failure analysis tool. The FA-Navigation software is seamlessly integrated into the user environment of Hamamatsu failure localization tools. |