Hamamatsu's Phemos-1000 emission microscope with laser stimulation capability offers the most superior infrared resolution and sensitivity available, matched only by our own Phemos-2000 system.

The Phemos series is designed with an extensive upgrade path in mind allowing users to select from a basic CCD only emission system to a system capable of CCD, InGaAs, automated software acquisition and multiple laser wavelength laser stimulation performance for packaged devices as well as 200mm or 300mm wafers. Capability of integrating Hamamatsu's custom NanoLens control technology allows the Phemos-1000 to resolve the finest IC features by providing infrared resolution greater than 250nm.

• 200mm or 300mm Frontside/Backside capability
• Independent high N.A. macro lens
• InGaAs and/or CCD emission detector
• Hamamatsu .76NA 50X lens
• Flexible scan patterns
• Multi-vendor Prober Compatibility
• Tester cable docking
• High laser throughput
• PicoAmp OBIRCH sensitivity
• 10A OBIRCH amplifier option
• NAIL lens option (NanoLens)
• Functional failure localisation option
• Semi compliant
• 2 wavelength support
• Macro lens and 5 lens turret
• +/- 4.0um (XYZ) repeatability

• Failure Analysis
• Yield Enhancement
• Localization of ESD damage, Hot carriers, Latch up, Oxide breakdown, Inteconnect defects, Functional failures

Technical Note: NanoLens (Solid Immersion Lens)  (112KB)
Technical Note: M10383 Digital Lock-in unit  (288KB)
Technical Note: Dynamic Analysis by Laser Stimulation  (144KB)
Technical Note: InGaAs camera C8250 series  (128KB)
Technical Note: SI-CCD camera (262KB)

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