Leveraging Hamamatsu's nearly 20 years of emission microscope and infrared optical design experience the Phemos-2000 emission microscope with laser stimulation capability offers the highest infrared resolution and sensitivity available for 300mm frontside/backside failure analsis.

The Phemos series is designed with an extensive upgrade path in mind allowing users to select from a basic CCD only emission system to a system capable of CCD, InGaAs, automated software acquisition and multiple laser wavelength laser stimulation performance for packaged devices as well as 200mm or 300mm wafers.

Hamamatsu's Phemos-2000 is specifically designed for both emission and laser stimulation of today and tomorrows devices through its ability to provide infrared resolution to 250nm and it's exceptional stability allowing for stable probing of the finest IC features.

• 200mm or 300mm Frontside/Backside capability
• Independent macro lens
• InGaAs and/or CCD emission detector
• Hamamatsu .76NA 50X lens
• Flexible scan patterns
• Multi-vendor Prober Compatibility
• Tester cable docking
• High laser throughput
• PicoAmp OBIRCH sensitivity
• 10A OBIRCH amplifier option
• NAIL lens option (NanoLens)
• Semi compliant
• 3 wavelength support
• Macro lens and 5 lens turret
• Laser marker
• Temperature Control Drift Compensation
• +/- 0.1um (XY), +/- 0.2um (Z) repeatability
• Defect Management Software (DMS) option

• Failure Analysis
• Yield Enhancement
• Localization of ESD damage, Hot carriers, Latch up, Oxide breakdown, Inteconnect defects, Functional failures

Technical Note: NanoLens (Solid Immersion Lens)  (112KB)
Technical Note: M10383 Digital Lock-in unit  (372KB)
Technical Note: Dynamic Analysis by Laser Stimulation  (144KB)

(For download please click on the pdf-icon)